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SOLVED:A voltage v=0.2 sin(130 t) V is supplied to the rotary capacitive MEMS actuator of Figure 10.46. Find the steady-state response of the mobile armature knowing its moment of inertia is J=1.2 ·10^-18  kg  m^2, the viscous damping coefficient (not symbolized in the Figure) is c=20  N  m  s, and the spiral spring stiffness is k=2.2  N  m. Known also are the fixed gap g=4 μm, the radius R=220 μm and electric permittivity ε=8.4 ·10^-12  F / m
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