For decades, optical inspection has been the primary method for process control in fabs. However, the move to multi-level ...

Optical inspection always has been the workhorse technology for finding defects in chips. It’s fast, cost-efficient, and generally reliable enough for most chips. But as logic scales into the angstrom ...

Defect inspection scientists from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a thorough review of new perspectives and ...

Optical surface defect inspection and imaging techniques are pivotal to ensuring high-performance outcomes across a myriad of applications including semiconductor manufacturing, precision optics, and ...